Isotopically-enriched boranes and methods of preparing them

ABSTRACT

The invention provides new methods for synthesis of large boron hydride clusters e.g., boron hydride molecules of the formula B n H m  where 5≦n≦96 and m≦n+8, wherein m and n satisfy the electron counting rules of macropolyhedral boranes. The invention is particularly useful for synthesis of octadecaborane (B 18 H 22 ). Preferred methods of the invention include iteratively generating a conjugate acid from a salt of the [B a H b ] c−  or [B n+2 H m−4 ] 2−  anion followed by degradation under conditions conducive to concentrating and drying of the conjugate acid to provide a borane B n H m  and residual salt of the [B a H b ] c−  or [B n+2 H m−4 ] 2−  anion which is reused in the method of synthesis. The invention further provides isotopically enriched boranes, particularly isotopically enriched  10 B 18 H 22  and  11 B 18 H 22 .

BACKGROUND

1. Field of the Invention

The invention provides methods for synthesizing borane compoundscomprising between about 5 and about 96 boron atoms or more preferablybetween 5 and 36 boron atoms. The invention further providesisotopically enriched boron compounds prepared by the aforementionedmethods. In certain aspects, the invention relates to B₁₈H₂₂, including¹⁰B- and ¹¹B-enriched B₁₈H₂₂, and methods of preparing same.

2. Background

Large boron hydride compounds have become important feed stocks forboron doped P-type impurity regions in semiconductor manufacture. Moreparticularly, high molecular weight boron hydride compounds, e.g., boronhydride compounds comprising at least a five (5) boron atom cluster, arepreferred boron atom feed stocks for boron atom implantation.

An important aspect of modern semiconductor technology is the continuousdevelopment of smaller and faster devices. This process is calledscaling. Scaling is driven by continuous advances in lithographicprocess methods, allowing the definition of smaller and smaller featuresin the semiconductor substrate which contains the integrated circuits. Agenerally accepted scaling theory has been developed to guide chipmanufacturers in the appropriate resize of all aspects of thesemiconductor device design at the same time, i.e., at each technologyor scaling node. The greatest impact of scaling on ion implantationprocesses is the scaling of junction depths, which requires increasinglyshallow junctions as the device dimensions are decreased. Thisrequirement for increasingly shallow junctions as integrated circuittechnology scales translates into the following requirement: ionimplantation energies must be reduced with each scaling step. Theextremely shallow junctions called for by modern, sub-0.13 microndevices are termed “Ultra-Shallow Junctions” or USJs.

Methods of manufacturing boron doped P-type junctions have been hamperedby difficulty in the ion-implantation process using boron. The boronatom, being light (MW=10.8), can penetrate more deeply into a siliconsubstrate and diffuse throughout the substrate lattice rapidly duringannealing or other elevated temperature processes.

Boron clusters or cages, e.g., boranes have been investigated as a feedstock for delivering boron to a semiconductor substrate with reducedpenetration. For example, as recited in commonly assigned InternationalPatent Application PCT/US03/20197 filed Jun. 26, 2003, boron ions may beimplanted into a substrate by ionizing boron hydride molecules of theformula B_(n)H_(m) (where 100>n>5 and m≦n+8) and an ion source for usein said implantation methods. Certain preferred compounds for use in theboron ion implantation methods included decaborane (B₁₀H₁₄) andoctadecaborane (B₁₈H₂₂).

Large boron hydride compounds, that is boron compounds having between 5and about 100 boron atoms (more typically between 10 and about 100 orbetween 5 and about 25 boron atoms) are preferred for use in molecularion implantation methods for delivering boron atoms to a semiconductorsubstrate. Typically two or more structural isomers exist of large boronhydride compounds, e.g., two or more compounds having the same chemicalformula but different structural arrangement of boron atoms in the cagestructure. In addition, two or more structurally related boron hydridecompounds having the same number of boron atoms but different numbers ofhydrogen atoms have been isolated for various sized boron clusters. Suchcompounds are frequently referred to as closo (B_(n)H_(n)),nido(B_(n)H_(n+2)), arachno (B_(n)H_(n+4)), hypho (B_(n)H_(n+6)),conjuncto (B_(n)H_(n+8)), and the like. Thus, a plurality of differentboron hydride species, including structural isomers and compoundscontaining various amounts of hydrogen are frequently known for boronhydrides having n boron atoms. See, for example, Jemmis, et al., J. Am.Chem. Soc., v. 123, 4313-4323 (2001), which provides a review of variousmacropolyhedral boranes and known compounds having n boron atoms andvarious amounts of hydrogen.

Mixtures of structural isomers and mixtures of n-boron atom containingboron hydrides are suitable for use in the implantation methods, inpart, because the molecular ions generated by the ionization process ofboron hydride mixtures will have uniform and narrow weightdistributions.

Current synthetic technologies for the preparation of large boronhydride molecules, e.g., boron hydride molecules with more than 12 boronatoms, are often plagued by complicated synthetic processes, lowisolated yields, and/or inconsistent reproducibility.

Kaczmarcyzk (J. Am. Chem. Soc., v. 96, 5953-5954 (1974)) and Graham(U.S. Pat. No. 3,350,324) recite methods of fusing anionic dodecaboranepolyhedral cages to generate macropolyhedral clusters. For example,Kaczmarcyzk recites degrading a conjugate acid of the dodecaborane anionin water followed by addition of tetramethylammonium hydroxide togenerate a [Me₄N]₅B₄₈H₅ and [Me₄N]₂B₂₄H₂₃. Graham recites a similarprocedure.

For example, several reports issued in the mid-1960's regarding methodsof preparing B₁₈H₂₂ by degradation of the conjugate acid of [B₂₀H₁₈]²⁻.However, each of the synthetic procedures disclosed in these referenceshave not been reproducible or offer the final product in unacceptablylow yield.

Olsen described the preparation and exploratory chemistry of B₁₈H₂₂ in apaper published in The Journal of the American Chemical Society (J. Am.Chem. Soc., v. 90, 2946-2952 (1968)). Olsen recites a certain method ofpreparing B₁₈H₂₂ which involves passage of a salt of the [B₂₀H₁₈]²⁻anion, dissolved in a mixed solvent of 90% absolute ethanol and 10%acetonitrile, through an acid ion-exchange column to yield a yellowsolution of the hydrated conjugate acid of the B₂₀H₁₈ anion, e.g.,H₂[B₂₀H₁₈].xH₂O. The solution is concentrated under vacuum and as thelast traces of volatile solvent are removed, the yellow solutionundergoes an exothermic reaction evolving appreciable quantities ofhydrogen gas. After about 20 minutes, the evolution of gas ceases and aviscous yellow oil results. After an additional 12 hours on the vacuumline, the yellow oil is subjected to an extraction using a mixture ofcyclohexane and water. The cyclohexane layer is separated from the waterusing a separatory funnel. Removal of cyclohexane yields B₁₈H₂₂ as amixture of two isomers. Olsen reports an isolated yield of 53%.

In a preliminary disclosure, Hawthorne reports a similar procedure tothe synthetic protocol of Olsen in which the initial solvent and theextraction conditions are modified (J. Am. Chem. Soc. 87, 1893 (1965)).That is, the residue of the conjugate acid, after concentration, isextracted with ether and subsequent addition of water inducedeffervescence. Hawthorne reports an isolated yield of 60% of B₁₈H₂₂after purification by fractional crystallization and sublimation.

The Hawthrone publication further reports certain methods for thepreparation of salts comprising the [B₂₀H₁₈]²⁻ anion.

Chamberland recites the preparation of (H₃O)₂B₂₀H₁₈.3.5H₂O by passing asalt of the [B₂₀H₁₈]²⁻ anion through an acidic ion-exchange resin(Inorganic Chemistry, v.3, 1450-1456 (1964)). Chamberland teaches thatthe conjugate acid of the [B₂₀H₁₈]²⁻ anion is unstable and decomposesslowly to form B₁₈H₂₂ and boric acid. However, Chamberland fails toreport a yield or level of conversion for this procedure.

U.S. Pat. No. 6,086,837, issued to Cowen, et al., relates to multi-stepmethods of synthesizing isotopically enriched decaborane, which methodsinclude extensive purification processes and the use of enricheddecaborane in boron neutron capture therapeutic pharmaceuticals.

Although there are several synthetic routes reported in the literaturefor the preparation of large boranes, they are lengthy and often producecompounds in notably low yields. It thus would be desirable to have newmethods to synthesize boron hydride compounds. It would be particularlydesirable to have new methods to synthesize B_(n)H_(m) compounds (wheren is between 5 and 48 and m≦n+8) and more preferably to synthesizeB₁₈H₂₂, B₂₀H₂₄, and related large boron hydride cluster molecules.

SUMMARY OF THE INVENTION

Remarkably, we have discovered new methods for the preparation of boronhydrides having between 5 and 96 boron atoms and more preferablypreparation of boron hydrides having between 10 and about 48 boronatoms, including isotopically enriched boron hydride compounds. Theinvention is particularly useful for synthesis of B₁₈H₂₂ or B₂₀H₂₄ andisotopically enriched forms thereof. The present invention also relatesto isotopically-enriched B₁₈H₂₂ in which ratio of boron isotopes isshifted from the natural abundance of boron, e.g., B₁₈H₂₂ in which theratio of ¹⁰B to ¹¹B is shifted from 19.9:81.1. More preferably theinvention provides isotopically-enriched B₁₈H₂₂ in which at least 50% ofthe boron atoms are ¹⁰B or in which at least 90% of the boron atoms are¹¹B.

A typical molecular ion beam of B₁₈H₂₂ contains ions of a wide range ofmasses due to loss of a varying number of hydrogens from the molecularion as well as the varying mass due to the two naturally occurringisotopes. Because mass selection is possible in a implanter device usedin semiconductor manufacture, use of isotopically enriched boron inB₁₈H₂₂ can greatly reduce the spread of masses, thereby providing anincreased beam current of the desired implantation species. Thus, ¹¹Band ¹⁰B isotopically-enriched B₁₈H₂₂ is also of great interest.

Preferred methods of synthesis provided by the invention generate aneutral boranes or a mixture of boranes in which each borane contains nboron atoms (5<n<100). Preferred methods of synthesis generate productmixtures having substantially uniform chemical composition, e.g.,preferred methods of synthesis provide a compound of the formulaB_(n)H_(m), which may be present as one or more structural isomers. Incertain other aspects, methods of synthesis which provide a mixture ofboranes, each of which comprises n boron atoms and a different number ofhydrogen atoms, are also contemplated by the present invention, in partbecause, such mixtures of various n boron atom boranes will generatesubstantially the same mixture of molecular ions when subjected toionization during an implantation process as a borane compositioncomprising a single borane of the formula B_(n)H_(m). Thus, methodswhich provide two or more borane compounds such as B_(n)H_(m),B_(n)H_(p), and the like, where m≠p (and preferably the absolutedifference between m and p is less than about 8), are also contemplatedby the invention.

Methods of synthesis contemplate the preparation of boranes and boranemixtures by degradation of the conjugate acid of any macropolyhedralborane salt of the formula M_(c)[B_(a)H_(b)] where 10≦a≦100 and c is apositive integer (typically c is between 1 and about 6). Any anionicboron hydride salts comprising at least one negatively charged boronhydride species having at least 5 boron atoms is suitable for use as astarting material in the methods of synthesis of the invention.Preferred borane species of the formula M_(c)[B_(a)H_(b)] include thosein which c is 1-5 or more preferably c is 1, 2, or 3, and 10≦a≦100.

In certain aspects the invention provides methods of synthesizing aborane or a mixture of boranes, each borane having n boron atoms, themethod comprising the steps of:

-   (a) contacting a mixture of a borane anion of the formula    [B_(a)H_(b)]^(c−) and at least one solvent with an acidic    ion-exchange resin to produce H_(c)[B_(a)H_(b)] or a hydrate    thereof;-   (b) degrading at least a portion of H_(c)[B_(a)H_(b)] or the hydrate    thereof to generate at least one borane of the formula, B_(n)H_(m),    by concentrating the mixture comprising H_(c)[B_(a)H_(b)] or the    hydrate thereof under reduced pressure;-   (c) separating residual borane anion from product borane B_(n)H_(m);-   (d) repeating steps (a)-(d) with residual borane anion recovered in    step (c),    wherein n is an integer of from 5 to 96, a>n, b≦a+8, c is an integer    of 1-8, and m≦n+8.

Certain preferred methods of synthesizing a borane having n boron atomsand m hydrogen atoms or a mixture of boranes, each of which comprising nboron atoms, is represented schematically in the flow chart of FIG. 1,wherein n<a, b≦a+8, m<n+8, 1≦c≦6, and M is a mono or divalent cation.

Preferred methods of the invention are suitable to prepare isomericallypure B_(n)H_(m) boranes, mixtures of structural isomers of a B_(n)H_(m)borane, and mixtures of boranes having n boron atoms and differentnumbers of hydrogen atoms, wherein each B_(n)H_(m) borane may furtherconsist of a mixture of structural isomers. That is, the methods of theinvention, depending upon the number of boron atoms in the productB_(n)H_(m) borane and in the salt of the [B_(a)H_(b)]^(c−) anion providea mixture of borane species having n boron atoms which mixture iscapable of generating a molecular ion beam having a narrow massdistribution.

More particularly, preferred methods of the invention comprise (a)generating the hydronium ion salt of a boron hydride anion of theformula [B_(a)H_(b)]^(c−); (b) degrading at least a portion of thehydronium ion salt or a hydrate thereof (e.g., H_(c)[B_(a)H_(b)].xH₂O)under conditions conducive to drying and/or dehydrating the hydroniumion salt (such as, exposure to a reduced pressure atmosphere, exposureto a desiccant, or exposure to a dry gas stream, or the like) togenerate neutral boron hydride, B_(n)H_(m); (c) separating the productneutral boron hydride, B_(n)H_(m) from residual boron hydride anion[B_(a)H_(b)]^(c−); and (d) repeating steps (a) through (c) with theboron hydride anion [B_(a)H_(b)]^(c−) separated and recovered in step(c).

Preferred degradation conditions suitable for use in step (b) supra arenot particularly limited. Although not wishing to be bound by theory,conditions conducive to removal of water and other solvents ofcrystallization from the hydrated hydronium ion salt,H_(c)[B_(a)H_(b)].xH₂O (where x is a positive real number), are alsosuitable to induce degradation of at least a portion of the hydroniumion. Typically preferred degradation conditions include contacting thehydrated hydronium salt H_(c)[B_(a)H_(b)].xH₂O with a reduced pressureatmosphere, a dry gas stream, or one or more drying agents such asmolecular sieves, phosphorus pentoxide, alumina, silica, silicates andthe like, or a combination thereof. Particularly preferred methods ofsynthesis comprise degradation conditions in step (b) in which thehydrated hydronium salt. H_(c)[B_(a)H_(b)].xH₂O, is contacted with areduced pressure atmosphere at a temperature of at least about 0° C. (ormore preferably at a temperature of between about 20° C. and about 150°C., or between about 20° C. and about 100° C.).

In a preferred aspect of the invention, a solution of an ammonium saltof the boron hydride anion, [B_(n+2)H_(m−4)]²⁻ is contacted with anacidic ion-exchange resin to generate the corresponding hydronium salt(H₂[B_(n+2)H_(m−4)]) or hydronium salt hydrate(H₂[B_(n+2)H_(m−4)].xH₂O); the solution containing the hydronium salt isconcentrated under reduced pressure to remove solvent and to decomposeat least a portion of the hydronium salt thereby generating hydrogengas, boric acid and neutral boron hydride, B_(n)H_(m); the neutral boronhydride (B_(n)H_(m)) and residual boron hydride anion [B_(n+2)H_(m−4)]²⁻are separated by biphasic extraction; and residual boron hydride anion[B_(n+2)H_(m−4)]²⁻ is recovered from the aqueous phase of the separationand resubjected to the acidic ion-exchange resin to generate additionalneutral boron hydride, B_(n)H_(m). A particularly preferred synthesisprovides B₁₈H₂₂ from [B₂₀H₁₈]²⁻ or B₂₀H₂₄ from [B₂₂H₂₀]²⁻.

In a preferred aspect of the invention, a solution of an ammonium saltof the boron hydride anion, [B_(n+2)H_(m−4)]²⁻ is contacted with anacidic ion-exchange resin to generate the corresponding hydronium salt(H₂[B_(n+2)H_(m−4)]) or hydronium salt hydrate(H₂[B_(n+2)H_(m−4)].xH₂O); the solution containing the hydronium salt isconcentrated under reduced pressure to remove solvent and to decomposeat least a portion of the hydronium salt thereby generating hydrogengas, boric acid and neutral boron hydride, B_(n)H_(m); the neutral boronhydride (B_(n)H_(m)) and residual boron hydride anion [B_(n+2)H_(m−4)]²⁻are separated by extracting the residue with hydrocarbon solvent andfiltering; residual boron hydride anion [B_(n+2)H_(m−4)]²⁻ is recoveredfrom remaining residues through dissolution into acetonitrile andresubjected to the acidic ion-exchange resin to generate additionalneutral boron hydride, B_(n)H_(m). A particularly preferred synthesisprovides B₁₈H₂₂ from [B₂₀H₁₈]²⁻ or B₂₀H₂₄ from [B₂₂H₂₀]²⁻.

Yet other preferred synthetic methods provided by the present inventioninclude methods of synthesis using at least one salt comprising ananionic borane having between 10 and 96 boron atoms. Certainnon-limiting examples of suitable borane salts are disclosed in, forexample, Kaczmarczyk J. Am. Chem. Soc., v. 96, 5953 (1974), Jemmis, etal., J. Am. Chem. Soc., v. 123, 4313-4323 (2001), Spielvogel (U.S. Pat.No. 6,525,224), Wierema et al., Inorganic Chemistry, v. 8, 2024 (1969),Graham (U.S. Pat. No. 3,350,324), and “Chemistry of the Elements” by N.N. Greenwood and A. Earnshaw, Chapter 6, Butterworth and Heinemann(1986), each of which recites at least one salt comprising a boraneanion having between about 10 and about 48 boron atoms.

The methods of synthesis, which provide boron hydride compoundsB_(n)H_(m) in high isolated yield (>50%) and with few syntheticprocedures, are suitable for use in preparing isotopically enrichedcompounds, e.g., compounds in which the isotopic concentration of ¹⁰B is50% or more or the isotopic concentration of ¹¹B is 90% or more.Preparation of isotopically pure or isotopically enriched ¹⁰B or ¹¹Bboron hydride compounds is practical using the methods of synthesis ofthe invention due, in part, to the limited number of synthetic steps,mass efficiency, and high overall synthetic yield.

The invention further provides isotopically enriched octadecaboranecompounds (B₁₈H₂₂) and other large boron hydride compounds prepared bythe methods of the invention. More particularly, the invention providesoctadecaborane compounds (B₁₈H₂₂) and other large boron hydridecompounds in which at least 50% of the boron atoms are ¹⁰B or compoundsin which at least 90% of the boron atoms are ¹¹B.

Other aspects of the invention are discussed infra.

BRIEF DESCRIPTION OF THE DRAWINGS

We first briefly describe the drawings of the preferred embodiment ofthe invention.

FIG. 1 is a flow chart of a method of synthesizing a borane having nboron atoms and m hydrogen atoms or a mixture of boranes, each of whichcomprising n boron atoms wherein n<a, b≦a+8, m≦n+8, 1≦c≦6, and M is amono or divalent cation; and

FIG. 2 is flow chart of a method of synthesizing a borane having n boronatoms and m hydrogen atoms wherein n is an integer of between 5 and 48and m≦n+8.

DETAILED DESCRIPTION OF THE INVENTION

Remarkably, we have discovered new methods for the preparation of boronhydrides, including B₁₈H₂₂ and related large boron hydride compounds,which can be useful as feed stocks for methods of implanting boron atomsin a substrate by molecular ion implantation.

In one preferred aspect, the invention provides a method of synthesizinga borane having n boron atoms and m hydrogen atoms, the methodcomprising the steps of:

-   (a) contacting a mixture of a borane anion of the formula    [B_(n+2)H_(m−4)]²⁻ and at least one solvent with an acidic    ion-exchange resin to produce H₂[B_(n+2)H_(m−4)];-   (b) degrading at least a portion of H₂[B_(n+2)H_(m−4)].xH₂O to    generate B_(n)H_(m) by concentrating and drying the mixture    comprising H₂[B_(n+2)H_(m−4)].xH₂O;-   (c) separating residual borane anion from product B_(n)H_(m); and-   (d) repeating steps (a)-(c) with residual borane anion recovered in    step (c),    wherein n is an integer of from 5 to 48, m≦n+8, and x is a    non-negative real number.

Certain preferred methods of synthesizing a borane having n boron atomsand m hydrogen atoms is represented schematically in the flow chart ofFIG. 2.

Preferred methods of the invention provide methods of synthesis ofborane hydride compounds having between 12 and 36 boron atoms, between12 and 24 boron atoms, between 14 and about 22 boron, or more preferablyhaving 16, 18, 20, or 22 boron atoms. Certain particularly preferredmethods of synthesis provided by the present invention include those inwhich the borane anion of the formula [B_(n+2)H_(m−4)]²⁻ is [B₂₀H₁₈]²⁻and the boron hydride of the formula B_(n)H_(m) is B₁₈H₂₂ or the boraneanion of the formula [B_(n+2)H_(m−4)]²⁻ is [B₂₂H₂₀]²⁻ and the boronhydride of the formula B_(n)H_(m) is B₂₀H₂₄.

In another preferred aspect, the invention provides methods of synthesisof isotopically enriched boron hydride compounds, including isotopicallyenriched B_(n)H_(m) (where 5≦n≦48 and m≦n+8). Thus, the inventionprovides methods of preparing isotopically enriched B_(n)H_(m) in whichat least about 50% of the boron atoms present in B_(n)H_(m) are ¹⁰B, atleast about 80% of the boron atoms present in B_(n)H_(m) are ¹⁰B, atleast about 90% of the boron atoms present in B_(n)H_(m) are ¹⁰B, atleast about 95% of the boron atoms present in B_(n)H_(m) are ¹⁰B, ormore preferably at least about 99% of the boron atoms present inB_(n)H_(m) are ¹⁰B. The invention further provides methods of preparingisotopically enriched B_(n)H_(m), in which at least about 90% of theboron atoms present in the B_(n)H_(m) are ¹¹B, in which at least about95% of the boron atoms present in the B_(n)H_(m) are ¹¹B, or morepreferably in which at least about 99% of the boron atoms present in theB_(n)H_(m) are ¹¹B.

Preferred methods of synthesizing a borane having n boron atoms and mhydrogen atoms include those methods in which wherein steps (a)-(c) arerepeated at least once. More preferably, steps (a)-(c) are repeatedbetween about 2 and about 20 times, between about 3 and about 12 timesor steps (a)-(c) are repeated 4, 5, 6, 7, 8, 9 or 10 times.

Preferred solvents for solutions of salts of the [B_(a)H_(b)]^(c−) or[B_(n+2)H_(m−4)]²⁻ anion which are suitable for the methods of theinvention include any solvent or mixture of solvents capable ofsolublizing a salt of the [B_(a)H_(b)]^(c−) or [B_(n+2)H_(m−4)]²⁻ anionand the conjugate acid thereof. More particularly, certain preferredsolvents which are suitable for the methods of the invention includealcohols, nitrites, oxiranes, ethers, esters formamides, acetamides,sulfones and mixtures thereof. More preferably the solvent is a loweralcohol (e.g., an alcohol having between one and six carbon atoms suchas methanol, ethanol, isopropanol, n-propanol, and the like),acetonitrile, diethyl ether, tetrahydrofuran, dioxane, or a mixturethereof, or more preferably a mixture of methanol, ethanol, oracetonitrile. Particular preferred solvents for solutions of salts ofthe [B_(a)H_(b)]^(c−) or [B_(n+2)H_(m−4)]²⁻ anion include methanol,ethanol (including absolute ethanol and ethanol azeotropes with water orbenzene), tetrahydrofuran, acetonitrile (or acetonitrile/watersolutions), and mixtures thereof which may be anhydrous or comprisetrace or residual water. Certain preferred solvents includeethanol/acetonitrile mixtures comprising between about 50% and about 99%ethanol by volume and between about 50% and about 1% acetonitrile byvolume, or more preferably between about 80% and about 95% ethanol byvolume and between about 20% and about 5% acetonitrile by volume.

The concentration of salt solutions of the [B_(a)H_(b)]^(c−) or[B_(n+2)H_(m−4)]²⁻ anion, which are suitable for use in the methods ofthe invention, is not particularly limited. Thus, preferredconcentrations of the salt solutions include those at which the salt ofthe [B_(a)H_(b)]^(c−) or [B_(n+2)H_(m−4)]²⁻ anion, the intermediatehydronium salt (H_(c)[B_(a)H_(b)] or H₂[B_(n+2)H_(m−4)] and hydratesthereof), and product B_(n)H_(m) borane are soluble. More particularly,concentrations of the salt solution of the [B_(a)H_(b)]^(c−) or[B_(n+2)H_(m)]²⁻ anion are between about 0.0001 M to a saturatedsolution, or more preferably between about 0.001 M to about 0.5 M orbetween about 0.005 M and about 0.1 M.

Any acidic ion-exchange resin capable of exchanging cations of a boraneanion with protons are suitable for use in the methods of synthesizing aborane having n boron atoms and m hydrogen atoms provided by theinvention. Preferred acidic ion-exchange resins include cross-linked,solvent-insoluble resins having a plurality of acidic functional groupscapable of exchanging a proton for the cation of the borane salt.Certain preferred acidic ion-exchange resins include aromatic orpartially aromatic polymers comprising a plurality of sulfonic acidresidues and more preferably include such aromatic or partially aromaticpolymers which are cross-linked. Particularly preferred acidicion-exchange resins include various commercially available crosslinkedsulfonated polystyrene, such as Amberlyst or the like.

In yet other aspects of the present invention, the acidic ion-exchangeresin may be replaced by a non-polymeric acid. More particularly, theacidic ion-exchange resin may be substituted by non-polymeric acidhaving a pK_(a) of less than about 2 (or more preferably the acidicion-exchange resin is replaced by a non-polymeric acid having a pK_(a)of less than about 1 or less than about 0). Certain preferrednon-polymeric acids having a pK_(a) of less than 2 include mineralacids, sulfuric acid, phosphoric acid, sulfonic acids of the formulaRSO₃H (where R is alkyl, haloalkyl, aryl, or aralkyl), and mixturesthereof. Particularly preferred non-polymeric acids having a pK_(a) ofless than 2 include hydrochloric acid, hydrobromic acid, hydroiodicacid, hydrofluoric acid, perchloric acid, sulfuric acid, phosphoricacid, toluenesulfonic acid (including para-toluenesulfonic acid,meta-toluenesulfonic acid, ortho-toluenesulfonic acid, and mixturesthereof), triflic acid, methanesulfonic acid, benzene sulfonic acid,benzenedisulfonic acid, and the like.

Preferably, the salt solution of the [B_(a)H_(b)]^(c−) or[B_(n+2)H_(m−4)]²⁻ anion is contacted with at least one equivalent ofacid, or more preferably two or more molar equivalents of acid. That is,the salt solution of the [B_(a)H_(b)]^(c−) or [B_(n+2)H_(m−4)]²⁻ anionis contacted with a sufficient amount of the acidic ion-exchange resinto generate a neutral hydronium salt of the [B_(a)H_(b)]^(c−) or[B_(n+2)H_(m−4)]²⁻ anion. More preferably, the salt solution of the[B_(a)H_(b)]^(c−) or [B_(n+2)H_(m−4)]²⁻ anion is contacted with betweenabout 2 and about 10 molar equivalents of acid, between about 2 andabout 9, 8, 7, or 6 molar equivalents of acid, or more preferably, thesalt solution of the [B_(a)H_(b)]^(c−) or [B_(n+2)H_(m−4)]²⁻ anion iscontacted with between about 2 and about 5 molar equivalents of acid.

The temperature at which the synthetic steps of the methods of theinvention are conducted are typically within the range of the freezingpoint and the boiling point of the solvent or solvent mixture of eachsynthetic step. Thus, for example, the temperature at which the saltsolution of the [B_(a)H_(b)]^(c−) or [B_(n+2)H_(m−4)]²⁻ anion iscontacted with an acidic ion-exchange resin is typically within thetemperature range defined by the freezing and boiling point of thesolvent(s). Preferred temperatures for step (a) include thosetemperatures at which both the salt of the [B_(a)H_(b)]^(c−) or[B_(n+2)H_(m−4)]²⁻ anion and the hydronium salt thereof (e.g.,H_(c)[B_(a)H_(b)] or H₂[B_(n+2)H_(m−4)] and hydrates thereof) aresoluble and preferably include temperatures of between about −20° C. andabout 100° C. More preferred temperature ranges for step (a) includethose temperatures between about −10° C. and about 80° C., about 0° C.and about 70° C. or at or about room temperature (e.g., between about15° C. and about 25° C.).

The contact between the salt solution of the [B_(a)H_(b)]^(c−) or[B_(n+2)H_(m−4)]²⁻ anion and the ion-exchange resin can be in acontinuous flow arrangement (e.g., where the salt solution passesthrough a column packed with the acidic ion-exchange resin) or in abatch wise process (e.g., where a mixture of the salt solution of the[B_(a)H_(b)]^(c−) or [B_(n+2)H_(m−4)]²⁻ anion and the acidicion-exchange resin are mixed in a vessel. After sufficient contact timethe resin is separated from the salt solution.

Continuous flow arrangements are typically preferred for simplicity ofdesign, ease of separation, and ease of ion-exchange regeneration.Typically, the salt solution is passed through a column packed with theacidic ion-exchange resin such that each portion of the salt solution isin contact with the resin, e.g., the solution “resides” in the column,for a specified period of time. Preferably, the solution residence timein the column is between about 1 second and about 24 hours. Morepreferably, solution residence time is between about 5 seconds and about12 hours, between about 15 seconds and about 8 hours, between about 30seconds and about 4 hours or between about 1 minute and about 2 hours.

Degradation of the hydronium salt, H_(c)[B_(a)H_(b)].xH₂O orH₂[B_(n+2)H_(m−4)].xH₂O (where x is a non-negative number), occurs afterremoval of substantially all of the solvent(s) and waters of hydration(e.g., the x equivalents of water) from the mixture which was contactedwith the acid or acidic ion-exchange column. The residue after removalof the solvent is maintained under a reduced pressure for at least about30 minutes during which time degradation of the hydronium salt occurswith a release of hydrogen gas. Typically, the residue is maintainedunder reduced pressure for at least one hour or more preferably theresidue is maintained under reduced pressure for between about 1 andabout 48 hours, or more preferably between about 2 and about 36 hours.Although the temperature at which the degradation occurs is notparticularly limited, preferred methods of the invention include thosein which the degradation occurs at between about 0° C. and about 200°C., between about 10° C. and about 150° C., or more preferably betweenabout 15° C. and about 100° C.

As used herein, “in vacuo,” “under reduced pressure” or “reducedpressure” refers to lowering the pressure within a reactor or vesselbelow atmospheric pressure. Typically preferred pressures include about500 mm Hg or less, or more preferably pressures of less than about 250mm Hg, less than about 100 mm Hg, less than about 50 mm Hg, less thanabout 10 mm Hg, less than about 1 mm Hg, less than about 0.1 mm Hg, lessthan about 0.01 mm Hg (i.e., less than about 10 mTorr), less than about1 mTorr, or less than about 0.1 mTorr. Typically preferred pressurescontemplated by the term “in vacuo” include pressures of less than 1 mmHg and pressures of less than about 1 mTorr.

Separation of the product borane (B_(n)H_(m)) from at least one salt ofthe residual [B_(n+2)H_(m−4)]²⁻ anion can be effected by any standardseparation technique used in synthetic organic or inorganic chemistryand may include extraction, partial crystallization, chromatography,sublimation, or a combination thereof. Preferred separation methodssuitable for use in the synthetic methods of the invention includeextraction using a biphasic fluid. That is, the residue after partial orcomplete degradation of the hydronium salt, H₂[B_(n+2)H_(m−4)] orH₂[B_(n+2)H_(m−4)].xH₂O, is dissolved in a biphasic mixture comprisingan aqueous layer and an organic layer such that salts of the residual[B_(n+2)H_(m−4)]²⁻ anion are dissolved in the aqueous layer and theproduct borane, B_(n)H_(m), is dissolved in the organic layer. Theorganic and aqueous layers are then separated. Other preferredseparation methods suitable for use in the synthetic methods of theinvention include extracting the residues using a hydrocarbon solventand filtering the slurry. That is, the residue after partial or completedegradation of the hydronium salt, H₂[B_(n+2)H_(m−4)] orH₂[B_(n+2)H_(m−4)].xH₂O, comprises the slurry precipitate and theproduct borane, B_(n)H_(m), is dissolved in the hydrocarbon layer. Theorganic layer is concentrated to provide the product borane, B_(n)H_(m).

Preferred organic fluids suitable for use in the separation processinclude linear, branched and cyclic hydrocarbons, alkylethers,haloalkanes, esters, and mixtures thereof. More preferably, suitableorganic fluids are selected from the group consisting of linear andbranched C₅-C₁₆ alkanes, petroleum ether, C₅-C₆cycloalkanes which may besubstituted with 0-3 alkyl groups, C₂-C₄alkylethers, C₁-C₄alkylacetates,and mixtures thereof. Other preferred organic fluids are selected frompentane, hexane, hexanes, heptane, cyclohexane, methylcyclohexane,diethyl ether, petroleum ether, and mixtures thereof. Halogen containingfluids, while contemplated for use in the methods of the invention, aregenerally not used in embodiments where mixtures of borane andhalogenated solvents potentially generate shock sensitive compounds.

Recovery of the residual borane [B_(a)H_(b)]^(c−) or [B_(n+2)H_(m−4)]²⁻anion from the aqueous layer of the biphasic separation preferablyoccurs by conversion of the hydronium salt, H_(c)[B_(a)H_(b)].xH₂O orH₂[B_(n+2)H_(m−4)].xH₂O into a salt form that is insoluble or sparinglysoluble in water. Preferred water insoluble or sparingly soluble saltsof the [B_(a)H_(b)]^(c−) or [B_(n+2)H_(m−4)]²⁻ anion include ammoniumsalts of the formula, [NR¹R²R³R⁴]_(c)[B_(a)H_(b)] or[NR¹R²R³R⁴]₂[B_(n+2)H_(m−4)] (in which R¹, R², and R³ are independentlyselected from the group consisting of alkyl and aralkyl, and R⁴ isselected from hydrogen, alkyl, or aralkyl).

In preferred embodiments an amount of NR¹R²R³ or [NR¹R²R³R⁴]X (wherein Xis an anion) sufficient to convert the hydronium salt, H_(c)[B_(a)H_(b)]or H₂[B_(n+2)H_(m−4)], (or hydrate thereof) into an ammonium salt isadded to the aqueous layer. The resulting ammonium salt is less solublethan the hydronium salt and precipitates. The recovered ammonium salt ofthe [B_(a)H_(b)]^(c−) or [B_(n+2)H_(m−4)]²⁻ anion may be resubjected tosteps (a)-(c) of the methods of the invention.

In certain embodiments, the tertiary amine is represented by (NR¹R²R³),wherein R¹, R², and R³ are independently selected from the groupconsisting of C₁₋₂₀alkyl, C₆₋₁₀aryl, and C₇₋₁₀aralkyl, or any two of R¹,R², R³ taken in combination form a heterocylic ring.

In certain preferred embodiments, the quaternary ammonium salt isrepresented by [NR¹R²R³R⁴]X, wherein

R¹, R², and R³ are independently selected from the group consisting ofC₁₋₁₀alkyl, C₆₋₁₀aryl, and C₇₋₁₀aralkyl, or any two of R¹, R², or R³taken in combination form a heterocyclic ring;

R⁴ is selected from hydrogen, C₁₋₂₀alkyl, or C₆₋₁₀aryl; and

X is an anion.

Preferred tertiary amines which are suitable for in recovery of theresidual [B_(a)H_(b)]^(c−) or [B_(n+2)H_(m−4)]²⁻ anion include compoundsof the formula NR¹R²R³ wherein

R¹, R², and R³ are independently selected from the group consisting ofC₁₋₆alkyl groups, or any two of R¹, R², or R³ taken in combination forma heterocyclic ring.

Preferred ammonium salts which are suitable for in recovery of the[B_(a)H_(b)]^(c−) or [B_(n+2)H_(m−4)]²⁻ anion include compounds of theformula [NR¹R²R³R⁴]X, wherein

R¹, R², and R³ are independently selected from the group consisting ofC₁₋₆alkyl groups, or any two of R¹, R², or R³ taken in combination forma heterocyclic ring;

R⁴ is selected from the group consisting of hydrogen, and C₁₋₆alkyl; and

X is chloride, fluoride, bromide, iodide, sulfate, bisulfate, phosphates(including hydrogen phosphate, dihydrogen phosphate),hexafluorophosphate, tetrafluoroborate, tetraarylborate (preferably,tetraphenylborate, tetra(4-trifluoromethylphenyl)borate,tetra(pentafluorophenyl)borate, and the like), arylsulfonates(preferably, benzenesulfonic acid, benzenedisulfonic acid, para-toluenesulfonic acid, and the like), or carbonate.

Preferred recycling steps provide recovery of at least about 80% of theresidual borane [B_(a)H_(b)]^(c−) or [B_(n+2)H_(m−4)]²⁻ anion. Morepreferably at least about 85% or about 90% recovery of the residualborane [B_(a)H_(b)]^(c−) or [B_(n+2)H_(m−4)]²⁻ anion. Preferably, theamine or ammonium salt is selected to provide a salt which is insolubleor sparingly soluble in water. In certain embodiments, an excess oftriethylammonium chloride provides about 90% recovery of the residualborane [B_(a)H_(b)]^(c−) or [B_(n+2)H_(m−4)]²⁻ anion.

The present invention further provides a method of synthesizing B₁₈H₂₂,the method comprising the steps of

-   (a) contacting a mixture of a [B₂₀H₁₈]²⁻ salt and at least one    solvent with an acidic ion-exchange resin to produce H₂[B₂₀H₁₈],    H₂[B₂₀H₁₈].xH₂O or a mixture thereof;-   (b) degrading at least a portion of the H₂[B₂₀H₁₈], H₂[B₂₀H₁₈].xH₂O    or mixture thereof to generate a residue comprising B₁₈H₂₂ by    concentrating and drying the mixture comprising H₂[B₂₀H₁₈].xH₂O    under reduced pressure;-   (c) extracting the residue with water and at least one water    immiscible fluid to generate an aqueous solution and a water    immiscible solution;-   (d) contacting the aqueous solution with an alkyl amine or an alkyl    ammonium salt to precipitate (B₂₀H₁₈)²⁻ salts; and-   (e) repeating steps (a)-(d) at least once.

Preferred methods of synthesizing B₁₈H₂₂ include methods in which steps(a)-(d) are repeated at least once. More preferably, steps (a)-(d) arerepeated between about 2 and about 20 times, between about 3 and about12 times or steps (a)-(d) are repeated 4, 5, 6, 7, 8, 9 or 10 times.

Certain preferred methods of synthesizing B₁₈H₂₂ comprise the steps of

-   (a) providing a salt of (B₂₀H₁₈)²⁻;-   (b) contacting the (B₂₀H₁₈)²⁻ salt in its free form, as a slurry in    at least one non-aqueous solvent, as an aqueous solution, or as a    solution in at least one non-aqueous solvent with an acid under    conditions conducive to the formation of a conjugate acid of the    (B₂₀H₁₈)²⁻ salt;-   (c) removing volatile components of the solution comprising the    conjugate acid of the (B₂₀H₁₈)²⁻ salt under conditions conducive to    the degradation of at least a portion of the conjugate acid of the    (B₂₀H₁₈)²⁻ salt;-   (d) extracting the residue with water and at least one water    immiscible fluid to generate an aqueous solution and a water    immiscible solution;-   (e) contacting the aqueous solution with an amine or an ammonium    salt to precipitate (B₂₀H₁₈)²⁻ salts;-   (f) repeating steps (b)-(e) at least once; and-   (g) concentrating the combined non-aqueous solutions to afford    B₁₈H₂₂.

Preferred methods of synthesizing B₁₈H₂₂ include methods wherein steps(b)-(e) are repeated at least once. More preferably, steps (b)-(e) arerepeated between about 2 and about 20 times, between about 3 and about12 times or steps (b)-(e) are repeated 4, 5, 6, 7, 8, 9 or 10 times.

Certain preferred methods of synthesizing B₁₈H₂₂ comprise the steps of

-   (a) providing a salt of (B₂₀H₁₈)²⁻;-   (b) contacting the (B₂₀H₁₈)²⁻ salt in its free form, as a slurry in    at least one non-aqueous solvent, as an aqueous solution, or as a    solution in at least one non-aqueous solvent with an acid under    conditions conducive to the formation of a conjugate acid of the    (B₂₀H₁₈)²⁻ salt;-   (c) removing volatile components of the solution comprising the    conjugate acid of the (B₂₀H₁₈)²⁻ salt under conditions conducive to    the degradation of at least a portion of the conjugate acid of the    (B₂₀H₁₈)²⁻ salt;-   (d) extracting the residue with hexanes or other suitable    hydrocarbon solvents in which boric acid byproduct is insoluble-   (e) repeating steps (c) and (d) until no further B₁₈H₂₂ is produced-   (f) contacting the residues with acetonitrile to dissolve any B₂₀H₁₈    ²⁻ containing salts-   (g) repeating steps (b)-(f) at least once; and-   (h) concentrating the combined hydrocarbon solutions to afford    B₁₈H₂₂.

Preferred methods of synthesizing B₁₈H₂₂ include methods wherein steps(b)-(f) are repeated at least once. More preferably, steps (b)-(f) arerepeated between about 2 and about 20 times, between about 3 and about12 times or steps (b)-(f) are repeated 4, 5, 6, 7, 8, 9 or 10 times.

The invention further provides B₁₈H₂₂ comprising isotopically-enrichedboron. Isotopically enriched boron hydrides, including isotopicallyenriched B₁₈H₂₂, are preferred feed stocks for ion implantationprocesses in part because isotopically labeled compounds have a morenarrow mass distribution. Thus, the invention provides isotopicallyenriched B₁₈H₂₂, in which at least about 50% of the boron atoms presentin the B₁₈H₂₂ are ¹⁰B, at least about 80% of the boron atoms present inthe B₁₈H₂₂ are ¹⁰B, at least at least about 90% of the boron atomspresent in the B₁₈H₂₂ are ¹⁰B, at least about 95% of the boron atomspresent in the B₁₈H₂₂ are ¹⁰B, or more preferably at least about 99% ofthe boron atoms present in the B₁₈H₂₂ are ¹⁰B. The invention furtherprovides isotopically enriched B₁₈H₂₂, in which at least about 90% ofthe boron atoms present in the B₁₈H₂₂ are ¹¹B, in which at least about95% of the boron atoms present in the B₁₈H₂₂ are ¹¹B, or more preferablyin which at least about 99% of the boron atoms present in the B₁₈H₂₂ are¹¹B.

Any process capable of recovering residual [B_(a)H_(b)]^(c−) or[B_(n+2)H_(m−4)]²⁻ anion is suitable for use in the methods of theinvention. However, inducing precipitation of a salt of the[B_(a)H_(b)]^(c−) or [B_(n+2)H_(m−4)]²⁻ anion by addition of an excessof a trialkylamine, a trialkylammonium halide, or a tetraalkylammoniumhalide to the aqueous solution generated during the biphasic extractionis a preferred method of recovery.

Preferred syntheses of the invention include preparation of neutralB₁₈H₂₂, which may be generated as a single isomer or a mixture ofstructural isomers, from an ammonium salt of [B₂₀H₁₈]²⁻. Typically, asolution of a triethylammonium salt or a tetraalkylammonium salt of[B₂₀H₁₈]²⁻ and at least one organic solvent is contacted with an acidicion-exchange resin to generate the conjugate acid H₂[B₂₀H₁₈].xH₂O, e.g.,the hydronium salt of [B₂₀H₁₈]²⁻. Removal of the solvent and degradationof H₂[B₂₀H₁₈].xH₂O afforded a mixture of B₁₈H₂₂ and H₂[B₂₀H₁₈].xH₂Owhich were separated by a water/hydrocarbon extraction. The boronhydride, B₁₈H₂₂, was recovered in the organic layer. Residual [B₂₀H₁₈]²⁻anion was recovered, with minimal mass loss, by conversion to anammonium salt, followed by recontacting it with the acidic ion-exchangeresin and degrading it under reduced pressure. After a plurality ofiterations, moderate to high yields of pure B₁₈H₂₂ were obtained.

In a preferred method, the solid residues may be extracted using onlyhydrocarbon based solvents and eliminating the aqueous phase. Afterpreliminary extractions the residues can be exposed to vacuum forfurther amounts of time and further product extracted. When no furtherB₁₈H₂₂ is being produce the residues can be dissolved into acetonitrileand subjected to acidic exchange resins and the process repeated untilthe desired yield is reached. This version of the method eliminates anyneed to precipitate the ammonium salt which often “oils” and can bedifficult to isolate.

As used herein, “borane” or “boron hydride” refers to compoundscomprising boron and hydrogen. More particularly borane or boron hydrideis indented to refer to boron hydrogen compounds of the formulaB_(n)H_(m) where 5≦n≦100 and m≦n+8 wherein m and n satisfy the electroncounting rules of macropolyhedral boranes. Although in certainembodiments additional elements may be present in the boron hydridecompounds, typically neutral boron hydride compounds consist essentiallyof boron and hydrogen. The terms borane and boron hydride are intendedto encompass isomerically pure boranes, mixtures of steroisomers,diastereomers, and structural isomers of compounds of the formulaB_(n)H_(m), and mixtures of boranes of the formula B_(n)H_((m)i) where iis the number of different boranes and (m)i is the number of hydrogenatoms in each of the i borane compounds wherein each (m)i can be thesame or different. Salts comprising a boron hydride anion comprise acation that is selected from any cationic species capable of forming astable isolable salt. Preferred cations include monovalent and divalentcations and include, for example, alkali metals, alkaline earth metals,and ammonium cations such as trialkylammonium and tetraalkylammoniumcations.

As used herein, the term “alkyl” refers to monovalent straight,branched, or cyclic alkyl groups preferably having from 1 to 20 carbonatoms, most preferably 1 to 10 carbon atoms (“lower alkyl”). This termis exemplified by groups such as methyl, ethyl, n-propyl, iso-propyl,n-butyl, iso-butyl, n-hexyl, 2-methylpropyl, 3-methylbutyl, and thelike.

As used herein, the term “cycloalkane” refers to cyclic aliphatichydrocarbons having between 3 and about 10 ring carbon atoms, or morepreferably between 5 and 8 or between 5 and 7 ring carbon atoms.Cycloalkanes may be substituted with one or more alkyl groupsubstituents. This term is exemplified by compounds such ascyclopentane, cyclohexane, methylcyclohexane and the like.

As used herein, the term “aralkyl” refers to monovalent straight,branched or cyclic alkyl groups substituted by at least one aryl group,wherein the term “aryl” indicates aromatic groups containing only carbonin the aromatic ring such as phenyl, biphenyl, 1-naphthyl and2-naphthyl. Specifically preferred aralkyl groups include benzyl,naphthylmethyl, phenethyl, 2-phenylethyl, and the like.

As used herein, the term “halo” or “halogen” refers to fluoro, chloro,bromo, or iodo.

As to any of the above groups that contain one or more substituents, itis understood by those skilled in the art, that such groups do notcontain any substitution or substitution patterns which are stericallyunfeasible and or synthetically impracticable.

The procedures reported by Olson and Hawthorne for preparing B₁₈H₂₂comprise dissolving an ammonium salt of the [B₂₀H₁₈]²⁻ anion (typicallya trialkylammonium or tetraalkylammonium salt) in absolute ethanol or a90:10 mixture of absolute ethanol and acetonitrile, passing the solutionthrough an acid ion exchange column, and decomposing the protonated[B₂₀H₁₈]²⁻ anion. The literature synthetic procedures recite isolatedyields of B₁₈H₂₂ of 53% and 60%. However, Applicants were unable toreproduce the reported isolated yields, obtaining only small amounts ofthe desired product. Numerous variations of the literature conditionswere investigated, including the use of anhydrous solvents, drying ofthe ion exchange column, solvent-water combinations and the like, withno improvement in the yield of isolated B₁₈H₂₂ (typically about 12% ofthe theoretical yield). Very large columns with large amounts of salt insolution passed through also consistently gave only a low yield uponworkup. We conclude that the procedures given in the literature, do notproduce the borane in the yield reported. Specifically, these proceduresdo not teach how to obtain consistently 50% or greater yields of theborane.

Surprisingly, it has been found that neutralization of the aqueoussolution with a base (such as triethylamine) after separation of theorganic solvents, or addition of more triethylammonium chloride,precipitates a salt of the [B₂₀H₁₈]²⁻ anion from the aqueous solution.This salt, when redissolved in the original solvents (90:10 mixture ofabsolute ethanol:acetonitrile), passed through the acidic ion exchangecolumn, and processed by the same procedure as the first extraction,provides another batch of B₁₈H₂₂ product. The recycling of the aqueoussolution can be repeated until the residual starting material isexhausted. An overall yield of greater than 50% of B₁₈H₂₂ is obtainedwith this novel method.

In a preferred method, the solid residues may be extracted using onlyhydrocarbon based solvents and eliminating the aqueous phase. Afterpreliminary extractions the residues can be exposed to vacuum forfurther amounts of time and further product extracted. When no furtherB₁₈H₂₂ is being produce the residues can be dissolved into acetonitrileand subjected to acidic exchange resins and the process repeated untilthe desired yield is reached. This version of the method eliminates anyneed to precipitate the ammonium salt which often “oils” and can bedifficult to isolate.

The invention now being generally described, it will be more readilyunderstood by reference to the following examples, which are includedmerely for purposes of illustration of certain aspects and embodimentsof the present invention, and are not intended to limit the invention.

EXAMPLE 1

A solution of (Et₃NH)₂[B₂₀H₁₈] (33 g, 75.3 mmol) in 1500 mL of absoluteethanol:acetonitrile (90:10 by volume) was prepared and then passedthrough a 500 g acid ion-exchange column as described in Olsen (J. Am.Chem. Soc., v. 90, 3946-3952 (1968)). Following the procedure providedby Olsen, 2.07 g (9.58 mmol) of B₁₈H₂₂ was obtained from the cyclohexaneportion of the cyclohexane-water extraction of the viscous yellow oil.The aqueous solution and residue was treated with an excess oftriethylammonium chloride which induced copious precipitation ofreclaimed (Et₃NH)₂[B₂₀H₁₈] (26.5 g, 60.5 mmol). Thus, after the firstpassage through the acid ion-exchange gave a 12.7% yield of the desiredB₁₈H₂₂ boron hydride compound and an 80.3% recovery of the starting(Et₃NH)₂[B₂₀H₁₈] salt (corresponding to a 7.6% loss of startingmaterial). Redissolution of the recovered (Et₃NH)₂[B₂₀H₁₈] in absoluteethanol:acetonitrile (90:10 by volume) mixture and passage through theregenerated acid ion-exchange column yielded another crop of product (ca7.5 mmol). Subsequent passages of recycled (Et₃NH)₂[B₂₀H₁₈] through aregenerated acid ion-exchange column afforded decreasing amounts ofproduct and recycled starting material. After six (6) iterations, acombined 50% yield of B₁₈H₂₂ was isolated.

Although not wishing to be bound by theory, the available data indicatesthat for maximum production efficiency with an acid ion-exchange columnof defined capacity, each passage through the column should be carriedout with the maximum quantity of starting material.

EXAMPLE 2

A solution of (Et₃NH)₂B₂₀H₁₈ (52.7 g, 120.1 mmol) in 320 mL of a 15:1acetonitrile:water mixture was stirred with 300 g of acid exchange resinfor 1 hour. The resin was filtered away from the yellow filtrate andrinsed with acetonitrile until the washings ran clear. The solution wasconcentrated on a rotary evaporator to ˜300 mL and placed on a columncontaining 300 g of acid exchange resin. The solution was eluted withacetonitrile and volatiles removed until a viscous yellow oil resulted.However, the viscous yellow oil was continually exposed to vacuum untila yellow, soft, sticky solid was formed (about 48 hours). 4.6 g (21.2mmol) of B₁₈H₂₂ was obtained from the cyclohexane portion of thecyclohexane-water extraction of the sticky yellow solid. The remainingB₂₀H₁₈ ²⁻ was recycled by the addition of NEt₃ as in Example 1. Therecovered B₂₀H₁₈ ²⁻ was dissolved in 320 mL of a 15:1 acetonitrile:waterand stirred over acidic exchange resin for 20 hours. The resin wasfiltered away from the yellow filtrate and rinsed with acetonitrileuntil the washings ran clear. The solution was concentrated on a rotaryevaporator to ˜300 mL and placed on a column containing 300 g of acidexchange resin. The solution was eluted with acetonitrile and volatilesremoved until a viscous yellow oil resulted. After removal of most ofthe solvent the yellow sticky residue was subjected to high vacuum untila hard pale yellow solid resulted (about 48 hours). 7.4 g (34.1 mmol) ofB₁₈H₂₂ was obtained from the cyclohexane portion of thecyclohexane-water extraction. Total yield of B₁₈H₂₂: 12.0 g, 55.3 mmol,46.1%.

EXAMPLE 3

25 mL of water was added to a solution of (Et₃NH)₂B₂₀H₁₈ (282.3 g, 643.4mmol) in 500 mL acetonitrile. The solution was placed onto a columncontaining 2 kg of acidic exchange resin and allowed to sit for 18hours. The yellow solution was eluted with acetonitrile until the eluantran clear. The collected acetonitrile solution was concentrated to ˜500mL and placed onto a second column with 2 kg of acidic exchange resin.The solution was eluted slowly over 2 hours and the column rinsed withacetonitrile and the washings ran clear. Acetonitrile was removed untila viscous yellow oil resulted. The oil was subjected to high vacuumuntil hydrogen evolution began and a hard solid formed (˜10 days). Thehard yellow solid was extracted using a mixture of 750 mL of cyclohexaneand 750 mL of water. The cyclohexane layer was separated from the waterand cyclohexane removed to give pale yellow B₁₈H₂₂ (43.7 g, 201.6 mmol)in 31.3% one pass yield. The water layer was neutralized withtriethylamine to precipitate out any remaining B₂₀H₁₈2−. The aboveprocess was repeated to give further B₁₈H₂₂ (16.6 g, 76.6 mmol) in 43.2%total yield. Remaining B₂₀H₁₈ ²⁻ was precipitated with triethylamine andcombined with other (Et₃NH)₂B₂₀H₁₈.

EXAMPLE 4

25 mL of water was added to a solution of (Et₃NH)₂B₂₀H₁₈ (273.7 g, 624.9mmol) in 500 mL of acetonitrile. The solution was placed onto a columncontaining 2 kg of acidic exchange resin and allowed to sit for 18hours. The yellow solution was eluted with acetonitrile until the eluantran clear. The collected acetonitrile solution was concentrated to ˜500mL and placed onto a second column with 2 kg of acidic exchange resin.The solution was eluted slowly over 2 hours and the column rinsed withacetonitrile and the washings ran clear. Volatiles were removed untilbright yellow crystals of H₂B₂₀H₁₈.xH₂O formed. The crystals werefiltered off and the bulk of the filtrate removed by suction. Thefiltrate was concentrated further to produce further amounts of freeacid which were similarly collected by filtration. This process wasrepeated until no further crystals formed. The wet yellow crystallinematerial was subjected to high vacuum until hydrogen evolution began anda hard solid formed (˜5 days). The hard solid was broken up and B₁₈H₂₂extracted with 500 mL of hexanes. Hexanes was filtered from the yellowsolid and the hexanes removed to give B₁₈H₂₂ (8.0 g, 36.9 mmol). Theexposure to vacuum and hexane extraction process was repeated until nofurther B₁₈H₂₂ formed. The remaining yellow solid was added to 500 mL ofacetonitrile, the undissolved material filtered, and the filtrate runthrough two columns of acidic exchange resin and acetonitrile removed asbefore. The yellow residues were exposed to vacuum and extracted withhexane until no further B₁₈H₂₂ was produced. Yield: 54.5 g, 251.1 mmol,40.1%.

EXAMPLE 5

(NEt₄)₂B₂₀H₁₈ (10.8 g, 21.8 mmol) was dissolved into a solutioncomprising 40 mL of acetonitrile and 5 mL of water and then stirred over54.0 g of acidic exchange resin for 24 hours. The resin was filtered offand washed thoroughly with acetonitrile. The filtrate and washings werecombined and concentrated to a yellow oil. The oil was placed undervacuum until a hard solid formed (˜5 days) and then extracted with 100mL of hexanes. Removal of hexanes left pale yellow B₁₈H₂₂ (2.0 g, 0.92mmol). The residue left over from the hexane extraction was exposed tovacuum and extracted a second time to remove more B₁₈H₂₂. Total yield:2.8 g, 12.9 mmol, 59.2%.

EXAMPLE 6

¹¹B enriched (NEt₃H)₂B₂₀H₁₈ (17.4 g, 35.2 mmol) was dissolved into 50 mLof acetonitrile and 5 mL of H₂O. The solution was placed on a columncontaining 500 g of acidic exchange resin and allowed to sit for 18hours. The solution was eluted from the column and the resin rinsedthoroughly with acetonitrile. The eluant and washings were combined andpassed through a second column over 2 hours. Acetonitrile was removed toform a thick slurry containing yellow crystals of H₂B₂₀H₁₈.xH₂O. Theslurry was exposed to vacuum over 10 days to produce a hard pale yellowsolid. To the solid was added 100 mL of H₂O and 100 mL of hexanes andthe mixture was stirred for 3 hours. The hexane layer was separated fromthe water layer, dried over K₂CO₃ and filtered. After removal of hexanes¹¹B enriched B₁₈H₂₂ was left as a pale yellow powder (3.5 g, 16.1 mmol,45.9%). ¹¹B enrichment was determined to be that of the starting B₂₀H₁₈²⁻ (>98.6% ¹¹B isotopic enrichment).

The invention has been described in detail with reference to preferredembodiments thereof. However, it will be appreciated that those skilledin the art, upon consideration of the disclosure, may make modificationsand improvements within the spirit and scope of the invention.

All of the patents and publications cited herein are hereby incorporatedby reference.

Those skilled in the art will recognize, or be able to ascertain usingno more than routine experimentation, many equivalents to the specificembodiments of the invention described herein. Such equivalents areintended to be encompassed by the following claims.

1. A method of synthesizing a borane having n boron atoms and m hydrogenatoms, the method comprising the steps of: (a) contacting a mixture of aborane anion of the formula [B_(a)H_(b)]^(c−) and at least one solventwith an acidic ion-exchange resin to produce H_(c)[B_(a)H_(b)] or ahydrate thereof; (b) degrading at least a portion of H_(c)[B_(a)H_(b)]or the hydrate thereof to generate at least one borane of the formula,B_(n)H_(m), by concentrating the mixture comprising H_(c)[B_(a)H_(b)] orthe hydrate thereof under reduced pressure; (c) separating residualborane anion from product borane B_(n)H_(m); (d) repeating steps (a)-(d)with residual borane anion recovered in step (c), wherein n is aninteger of from 5 to 96, a>n, b≦a+8, c is an integer of 1-8, and m≦n+8.2. A method of synthesizing a borane having n boron atoms and m hydrogenatoms, the method comprising the steps of: (a) contacting a mixture of aborane anion of the formula [B_(n+2)H_(m−4)]²⁻ and at least one solventwith an acidic ion-exchange resin to produce H₂[B_(n+2)H_(m−4)].xH₂O;(b) degrading at least a portion of H₂[B_(n+2)H_(m−4)].xH₂O to generateB_(n)H_(m) by concentrating and drying the mixture comprisingH₂[B_(n+2)H_(m−4)].xH₂O; (c) separating residual borane anion fromproduct B_(n)H_(m); and (d) repeating steps (a)-(c) with residual boraneanion recovered in step (c), wherein n is an integer of from 5 to 96,m≦n+8, and x is a non-negative real number.
 3. The method of claim 2,wherein the degradation step is conducted at reduced pressure, in a flowof dry gas, or in the presence of at least one desiccant.
 4. The methodof claim 2, wherein the degradation step is conducted at reducedpressure.
 5. The method of claim 2, wherein n is an integer selectedfrom 10, 12, 14, 16, 18, 20, and
 22. 6. The method of claim 2, whereinthe borane anion of the formula [B_(n+2)H_(m−4)]²⁻ is [B₂₀H₁₈]²⁻ and theboron hydride of the formula B_(n)H_(m) is B₁₈H₂₂ or the borane anion ofthe formula [B_(n+2)H_(m−4)]²⁻ is [B₂₂H₂₀]²⁻ and the boron hydride ofthe formula B_(n)H_(m) is B₂₀H₂₄.
 7. The method of claim 2, whereinsteps (a)-(c) are repeated at least once.
 8. The method of claim 2,wherein steps (a)-(c) are repeated between about 2 and about 20 times.9. The method of claim 2, wherein steps (a)-(c) are repeated betweenabout 4 and about 12 times.
 10. The method of claim 2, wherein theacidic ion-exchange resin is an aromatic or partially aromatic polymercomprising a plurality of sulfonic acid residues.
 11. The method ofclaim 10, wherein the acidic ion exchange resin is a crosslinkedsulfonated polystyrene.
 12. A method of synthesizing B₁₈H₂₂ comprisingthe steps of (a) contacting a mixture of a [B₂₀H₁₈]²⁻ salt and at leastone solvent with an acidic ion-exchange resin to produceH₂[B₂₀H₁₈].xH₂O; (b) degrading at least a portion of the H₂[B₂₀H₁₈].xH₂Oto generate B₁₈H₂₂ by concentrating and drying the mixture comprisingH₂[B₂₀H₁₈].xH₂O; (c) extracting the residue with water and at least onewater immiscible solvent; (d) contacting the aqueous solution with analkyl amine or an alkyl ammonium salt to precipitate (B₂₀H₁₈)²⁻ salts;and (e) repeating steps (a)-(d) at least once, wherein x is anon-negative real number.
 13. A method of synthesizing B₁₈H₂₂ comprisingthe steps of (a) contacting a mixture of a [B₂₀H₁₈]²⁻ salt and at leastone solvent with an acidic ion-exchange resin to produceH₂[B₂₀H₁₈].xH₂O; (b) degrading at least a portion of the H₂[B₂₀H₁₈].xH₂Oto generate B₁₈H₂₂ by concentrating and drying the mixture comprisingH₂[B₂₀H₁₈].xH₂O; (c) extracting the residue with hydrocarbon solvent;(d) contacting the residue with acetonitrile to dissolve B₂₀H₁₈ ²⁻salts; and (e) repeating steps (a)-(d) at least once, wherein x is anon-negative real number.
 14. A method of synthesizing B₁₈H₂₂ comprisingthe steps of (a) providing a salt of (B₂₀H₁₈)²⁻; (b) dissolving the(B₂₀H₁₈)²⁻ salt in a fluid comprising at least one non-aqueous solvent;(c) contacting the (B₂₀H₁₈)²⁻ salt solution with an acid to generate ahydronium salt of (B₂₀H₁₈)²⁻; (d) removing volatile components of thesolution in vacuo under conditions conducive to formation of B₁₈H₂₂ bydegradation of at least a portion of the hydronium salt of (B₂₀H ₁)²⁻;(e) extracting the residue with water and at least one water immisciblesolvent; (f) contacting the aqueous solution with an alkyl amine or analkyl ammonium salt to precipitate (B₂₀H₁₈)²⁻ salts; (g) repeating steps(b)-(f) at least once; and (h) concentrating the combined non-aqueoussolutions generated in step (e) to obtain B₁₈H₂₂.
 15. A method ofsynthesizing B₁₈H₂₂ comprising the steps of (a) providing a salt of(B₂₀H₁₈)²⁻; (b) dissolving the (B₂₀H₁₈)²⁻ salt in a fluid comprising atleast one non-aqueous solvent; (c) contacting the (B₂₀H₁₈)²⁻ saltsolution with an acid to generate a hydronium salt of (B₂₀H₁₈)²⁻; (d)removing volatile components of the solution in vacuo under conditionsconducive to formation of B₁₈H₂₂ by degradation of at least a portion ofthe hydronium salt of (B₂₀H₁₈)²⁻; (e) extracting the residue withhydrocarbon solvent; (f) contacting the remaining residues withacetonitrile to dissolve (B₂₀H₁₈)²⁻ salts; (g) repeating steps (b)-(f)at least once; and (h) concentrating the combined non-aqueous solutionsgenerated in step (e) to obtain B₁₈H₂₂.
 16. The method of claim 14,wherein the acid is a polymer.
 17. The method of claim 14 or claim 15,wherein the acid is an acidic ion-exchange resin.
 18. The method ofclaim 14, wherein the acid is a crosslinked polymer having a pluralityof sulfonic acid residues.
 19. The method of claim 14, wherein the acidis an organic acid having a pKa of less than about
 2. 20. The method ofclaim 14, wherein the acid is an inorganic acid having a pKa of lessthan about
 2. 21. The method of claim 14, wherein the non-aqueoussolvent is selected from the group consisting of alcohols, nitriles,ethers, and combinations thereof. 22 The method of claim 21, wherein thenon-aqueous solvent is methanol, ethanol, acetonitrile,acetonitrile/water solutions, tetrahydrofuran, dioxane, or a combinationthereof.
 23. The method of claim 22, wherein the non-aqueous solventcomprises between about 50% and about 99% ethanol by volume and betweenabout 50% and about 1% acetonitrile by volume, or the non-aqueoussolvent comprises between about 90% and 100% acetonitrile by volume andbetween 0% and about 10% water by volume.
 24. The method of claim 23,wherein the non-aqueous solvent comprises between about 80% and about95% ethanol by volume and between about 20% and about 5% acetonitrile byvolume.
 25. The method of claim 22, wherein the non-aqueous solvent isacetonitrile or a mixture of water and acetonitrile.
 26. The method ofclaim 14, wherein step (g) comprises repeating step (b) through step (f)between 1 and about 20 times.
 27. The method of claim 14, wherein step(g) comprises repeating step (b) through step (f) between 3 and 15times.
 28. The method of claim 14, wherein step (g) comprises repeatingstep (b) through step (f) between 4 and about 12 times.
 29. The methodof claim 14, wherein the (B₂₀H₁₈)²⁻ salt is contacted with at least two(2) molar equivalents of acid.
 30. The method of claim 29, wherein the(B₂₀H₁₈)²⁻ salt is contacted with between about two (2) and about twenty(20) molar equivalents of acid.
 31. The method of claim 29, wherein the(B₂₀H₁₈)²⁻ salt is contacted with about two molar equivalents of acid.32. The method of claim 14, wherein at least about 50% of the boronatoms present in the product B₁₈H₂₂ are ¹⁰B.
 33. The method of claim 32,wherein at least about 80% of the boron atoms present in the productB₁₈H₂₂ are ¹⁰B.
 34. The method of claim 32, wherein at least about 90%of the boron atoms present in the product B₁₈H₂₂ are ¹⁰B.
 35. The methodof claim 32, wherein at least about 95% of the boron atoms present inthe product B₁₈H₂₂ are ¹⁰B.
 36. The method of claim 32, wherein at leastabout 99% of the boron atoms present in the product B₁₈H₂₂ are ¹⁰B. 37The method of claim 14, wherein at least about 90% of the boron atomspresent in the product B₁₈H₂₂ are ¹¹B.
 38. The method of claim 37,wherein at least about 95% of the boron atoms present in the productB₁₈H₂₂ are ¹¹B.
 39. The method of claim 37, wherein at least about 99%of the boron atoms present in the product B₁₈H₂₂ are ¹¹B.
 40. The methodof claim 14, wherein an alkyl amine or an alkyl ammonium salt isselected from compounds of the formula NR¹R²R³ and from ammonium saltsof the formula [NR¹R²R³R⁴]X, wherein R¹, R², and R³ are independentlyselected from the group consisting of C₁₋₂₀alkyl, C₆₋₁₀aryl,C₇₋₁₀aralkyl, or any two of R¹, R², or R³ taken in combination form aheterocyclic ring; R⁴ is selected from hydrogen, C₁₋₂₀alkyl, orC₆₋₁₀aryl; and X is an anion.
 41. The method of claim 40, wherein thealkyl amine is selected from compounds of the formula NR¹R²R³ whereinR¹, R², and R³are independently selected C₁₋₆alkyl groups, or any two ofR¹, R², or R³ taken in combination form a heterocyclic ring.
 42. Themethod of claim 40, wherein the alkyl ammonium salt is selected fromcompounds of the formula [NR¹R²R³R⁴]X wherein; R¹, R², and R³ areindependently selected C₁₋₆alkyl groups, or any two of R¹, R², or R³taken in combination form a heterocyclic ring; R⁴ is selected fromhydrogen, C₁₋₆alkyl; and X is chloride, fluoride, bromide, iodide,sulfate, bisulfate, phosphate, hydrogen phosphate, dihydrogen phosphate,hexafluorophosphate, tetrafluoroborate, tetraarylborate, arylsulfonates,and carbonate.
 43. Isotopically enriched B₁₈H₂₂, wherein at least about50% of the boron atoms are ¹⁰B.
 44. The isotopically enriched B₁₈H₂₂ ofclaim 43, wherein at least about 80% of the boron atoms are ¹⁰B.
 45. Theisotopically enriched B₁₈H₂₂ of claim 43, wherein at least about 90% ofthe boron atoms are ¹⁰B.
 46. The isotopically enriched B₁₈H₂₂ of claim43, wherein at least about 95% of the boron atoms are ¹⁰B.
 47. Theisotopically enriched B₁₈H₂₂ of claim 43, wherein at least about 99% ofthe boron atoms are ¹⁰B.
 48. Isotopically enriched B₁₈H₂₂, wherein atleast about 90% of the boron atoms are ¹¹B.
 49. The isotopicallyenriched B₁₈H₂₂ of claim 48, wherein at least about 95% of the boronatoms are ¹¹B.
 50. The isotopically enriched B₁₈H₂₂ of claim 48, whereinat least about 99% of the boron atoms are ¹¹B.
 51. The method of claim15, wherein the acid is a polymer.
 52. The method of claim 15, whereinthe acid is an acidic ion-exchange resin.
 53. The method of claim 15,wherein the acid is a crosslinked polymer having a plurality of sulfonicacid residues.
 54. The method of claim 15, wherein the acid is anorganic acid having a pKa of less than about
 2. 55. The method of claim15, wherein the acid is an inorganic acid having a pKa of less thanabout
 2. 56. The method of claim 15, wherein the non-aqueous solvent isselected from the group consisting of alcohols, nitriles, ethers, andcombinations thereof. 57 The method of claim 56, wherein the non-aqueoussolvent is methanol, ethanol, acetonitrile, acetonitrile/watersolutions, tetrahydrofuran, dioxane, or a combination thereof.
 58. Themethod of claim 57, wherein the non-aqueous solvent comprises betweenabout 50% and about 99% ethanol by volume and between about 50% andabout 1% acetonitrile by volume, or the non-aqueous solvent comprisesbetween about 90% and 100% acetonitrile by volume and between 0% andabout 10% water by volume.
 59. The method of claim 58, wherein thenon-aqueous solvent comprises between about 80% and about 95% ethanol byvolume and between about 20% and about 5% acetonitrile by volume. 60.The method of claim 57, wherein the non-aqueous solvent is acetonitrileor a mixture of water and acetonitrile.
 61. The method of claim 15,wherein step (g) comprises repeating step (b) through step (f) between 1and about 20 times.
 62. The method of claim 15, wherein step (g)comprises repeating step (b) through step (f) between 3 and 15 times.63. The method of claim 15, wherein step (g) comprises repeating step(b) through step (f) between 4 and about 12 times.
 64. The method ofclaim 15, wherein the (B₂₀H₁₈)²⁻ salt is contacted with at least two (2)molar equivalents of acid.
 65. The method of claim 64, wherein the(B₂₀H₁₈)²⁻ salt is contacted with between about two (2) and about twenty(20) molar equivalents of acid.
 66. The method of claim 64, wherein the(B₂₀H₁₈)²⁻ salt is contacted with about two molar equivalents of acid.67. The method of claim 15, wherein at least about 50% of the boronatoms present in the product B₁₈H₂₂ are ¹⁰B.
 68. The method of claim 67,wherein at least about 80% of the boron atoms present in the productB₁₈H₂₂ are ¹⁰B.
 69. The method of claim 67, wherein at least about 90%of the boron atoms present in the product B₁₈H₂₂ are ¹⁰B.
 70. The methodof claim 67, wherein at least about 95% of the boron atoms present inthe product B₁₈H₂₂ are ¹⁰B.
 71. The method of claim 67, wherein at leastabout 99% of the boron atoms present in the product B₁₈H₂₂ are ¹⁰B. 72The method of claim 15, wherein at least about 90% of the boron atomspresent in the product B₁₈H₂₂ are ¹¹B.
 73. The method of claim 72,wherein at least about 95% of the boron atoms present in the productB₁₈H₂₂ are ¹¹B.
 74. The method of claim 72, wherein at least about 99%of the boron atoms present in the product B₁₈H₂₂ are ¹¹B.